Semiconductor TCAD Numerical Modeling and Simulation

CSUPREM (Crosslight-SUPREM) is a process simulation software package based on the SUPREM.IV.GS code developed at the Integrated Circuits Laboratory of Stanford University. SUPREM.IV.GS (2D) has long been recognized as the industry standard in process simulation for integrated circuit (IC) design for over a decade. Crosslight greatly enhances the capability of the original code from Stanford and extends it from 2D to 3D. Please refer to our full and mini CSUPREM product brochures for more details...

A brief introduction to Crosslight TCAD is also available in the following presentation and pamphlet.

Features

Reliable and flexible next-generation 2D/3D process simulator
2D, Quasi-3D, Hybrid-3D and Full 3D process simulation
2D and Full 3D device simulation when combined with APSYS
GPU-accelerated solver
Full 3D diffusion models
Highly effiicient mesh allocation based on stacked and bended mesh planes
Greatly reduced mesh count and faster computation time
Gauss, Pearson, SIMS data and user-defined models
Auto or user-controlled switch between four different etching models
Strained silicon, SiC and GaN-based material systems
Activation models for all dopants
Optimize devices using AutoTCAD and Design of Experiments (DOE)
Batch processing

Graphical user interface tools

MaskEditor: one-step 3D simulation layout designer
SimuCSuprem: simulation editor with built-in help wizard
CrosslightView: unified plotting interface for both process and device simulations